今天就让我们走进晶体管,看看芯片加工时人们常说的“纳米工艺”到底是什么意思吧!
参考资料:
[1] 中国科协. 鳍式场效应晶体管. [EB/OL]. 科普中国·科学百科. [2023.07.26]. https://baike.baidu.com/item/%E9%B3%8D%E5%BC%8F%E5%9C%BA%E6%95%88%E5%BA%94%E6%99%B6%E4%BD%93%E7%AE%A1/23200647?fromtitle=FinFET&fromid=5883551&fr=aladdin
[2] Chenming Hu. [EB/OL]. chu.berkeley.edu. https://www.chu.berkeley.edu/biography
[3] 胡正明. [EB/OL]. 百度百科. [2023.07.26]. https://baike.baidu.com/link?url=H8fPXUOwVjP2h0UWs-odPZwhelRj2_KiFQDlPSxRhBZbAmqa3DEit-R6amJlx929fAUPvQ563s2gyf2_Mrh0PBAgE4v-YC9WWAT_NiN9DxCVDqr0xYJvQPGpAfljChqJ
[4] 胡文平.有机电路的梦想与实践.[EB/OL].bilibili.(2020.07.04)[2023.07.27] https://www.bilibili.com/video/BV1Xa4y1Y7c3/?spm_id_from=333.788.videocard.9
[5] 科学声音.《大话集成电路17》-12英寸晶圆和5纳米工艺:80秒弄懂芯片核心词. [EB/OL].bilibili.(2022.05.27)[2023.07.27] https://www.bilibili.com/video/BV1d94y1U7UV/?spm_id_from=333.337.search-card.all.click
[6] Luffy Liu. 三星3nm GAA芯片流片成功,性能优于台积电的3nm?[EB/OL]. 电子工程专辑. (2021.06.30)[2023.07.27] https://www.eet-china.com/news/202106301115.html